1 % This file was created with JabRef 2.5.
5 author = {P. Abgrall and A.-M. Gué},
6 title = {Lab-on-chip technologies: making a microfluidic network and coupling
7 it into a complete microsystem---a review},
8 journal = {J. Micromech. Microeng.},
11 pages = {R15\,-\,R49},
12 doi = {10.1088/0960-1317/17/5/R01},
13 file = {Abgrall07-Review.pdf:Photolacke\\Abgrall07-Review.pdf:PDF},
14 url = {http://dx.doi.org/10.1088/0960-1317/17/5/R01}
18 author = {P. Abgrall and others},
19 title = {A novel fabrication method of flexible and monolithic {3D microfluidic
20 structures using lamination of SU-8} films},
21 journal = {J. Micromech. Microeng.},
24 pages = {113\,-\,121},
25 doi = {10.1088/0960-1317/16/1/016},
26 file = {SU-8-selbst-hergestellt.pdf:Photolacke\\SU-8-selbst-hergestellt.pdf:PDF},
27 url = {http://dx.doi.org/10.1088/0960-1317/16/1/016}
31 author = {S.N. Abolmasov and T. Shirafuji and K. Tachibana},
32 title = {Submillimeter Dielectric Barrier Discharges at Atmospheric Pressure:
34 journal = {IEEE Trans. Plasma Sci.},
37 pages = {941\,-\,948},
38 doi = {10.1109/TPS.2005.845093},
39 file = {Abolmasov-submillimeter-discharge-2005.pdf:DBD\\Abolmasov-submillimeter-discharge-2005.pdf:PDF},
42 Gute Berechnungsgrundlage, noch zwei Bücher der Literaturliste besorgen.},
43 url = {http://dx.doi.org/10.1109/TPS.2005.845093}
47 author = {Yu.S. Akishev and A.V. Dem\textrm{'}yanov and V.B. Karal\textrm{'}nik
48 and A.E. Monich and N.I. Trushkin},
49 title = {Comparison of the AC Barrier Corona with DC Positive and Negative
50 Coronas and Barrier Discharge},
51 journal = {Plasma Physics Reports},
55 doi = {10.1134/1.1538505},
56 file = {Akishev-Comparison-BC-dischages-2003.pdf:DBD\\Akishev-Comparison-BC-dischages-2003.pdf:PDF},
57 url = {http://www.triniti.ru/CTF\&VM/Articles/Demyanov3.pdf}
61 author = {S.E. Babayan and others},
62 title = {Deposition of silicon dioxide films with a non-equilibrium atmospheric-pressure
64 journal = {Plasma Sources Sci. Technol.},
67 pages = {573\,-\,578},
69 doi = {10.1088/0963-0252/10/4/305},
70 file = {:DBD\\Babayan-SiOx-2001.pdf:PDF},
71 publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
73 url = {http://dx.doi.org/10.1088/0963-0252/10/4/305}
77 author = {K.H. Becker and K.H. Schoenbach and J.G. Eden},
78 title = {Microplasmas and applications},
79 journal = {J. Phys. D: Appl. Phys.},
82 pages = {R55\,-\,R70},
83 doi = {10.1088/0022-3727/39/3/R01},
84 file = {:DBD\\Becker_Overview microplasmas-2006.pdf:PDF},
85 url = {http://dx.doi.org/10.1088/0022-3727/39/3/R01}
89 author = {B. Bilenberg and T. Nielsen and B. Clausen and A. Kristensen},
90 title = {PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with
92 journal = {J. Micromech. Microeng.},
95 pages = {814\,-\,818},
96 doi = {10.1088/0960-1317/14/6/008},
97 file = {Bile04.pdf:Photolacke\\Bile04.pdf:PDF},
98 url = {http://dx.doi.org/10.1088/0960-1317/14/6/008}
102 author = {F. J. Blanco and others},
103 title = {Novel three-dimensional embedded {SU-8} microchannels fabricated
104 using a low temperature full wafer adhesive bonding},
105 journal = {J. Micromech. Microeng.},
108 pages = {1047\,-\,1056},
109 doi = {10.1088/0960-1317/14/7/027},
110 file = {Blan04.pdf:Photolacke\\Blan04.pdf:PDF},
111 url = {http://dx.doi.org/10.1088/0960-1317/14/7/027}
115 author = {A. Bogaerts and E. Neyts and R. Gijbels and J. van der Mullen},
116 title = {Gas discharge plasmas and their applications},
117 journal = {Spectrochim. Acta. B Atom. Spectros.},
122 doi = {10.1016/S0584-8547(01)00406-2},
123 file = {:Allgemein\\2002_gas discharge plasmas and their applications.pdf:PDF},
124 publisher = {Elsevier},
125 url = {\href{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}{http://dx.doi.org/10.1016/S0584-8547(01)00406-2}}
129 title = {Technische Strömungslehre},
130 publisher = {Vogel-Verlag, Würzburg},
132 author = {Willi Bohl},
134 url = {http://www.worldcat.org/oclc/315749265}
138 author = {R. Brandenburg and others},
139 title = {Antimicrobial Treatment of Heat Sensitive Materials by Means of Atmospheric
140 Pressure {Rf}-Driven Plasma Jet},
141 journal = {Contrib. Plasma Phys.},
145 doi = {10.1002/ctpp.200710011},
146 file = {:DBD\\Brandenburg07-PlasmaJet-microbial.pdf:PDF},
147 url = {http://dx.doi.org/10.1002/ctpp.200710011}
151 author = {R. Brandenburg and H.-E. Wagner and A.M. Morozov and K.V. Kozlov},
152 title = {Axial and radial development of microdischarges of barrier discharges
153 in {N2/O2} mixtures at atmospheric pressure},
154 journal = {J. Phys. D: Appl. Phys.},
157 pages = {1649\,-\,1657},
159 doi = {10.1088/0022-3727/38/11/003},
160 file = {:DBD\\Brandenburg-DBD-characteristics-05.pdf:PDF},
161 publisher = {London: The Institute of Physics and The Physical Society.},
162 url = {http://dx.doi.org/10.1088/0022-3727/38/11/003}
166 author = {M.C. Breadmore and E. Candish and R.M. Guijt},
167 title = {Dry film photoresist, saving time and money without compromising
169 booktitle = {\textmu TAS 2009},
174 title = {Theoretical Microfluidics},
175 publisher = {Oxford University Press},
177 author = {Henrik Bruus},
178 url = {http://www.worldcat.org/oclc/176807166}
182 author = {N.A. Bullett and others},
183 title = {Direct imaging of plasma-polymerized chemical micropatterns},
184 journal = {Surf. Interface Anal.},
187 pages = {1074\,-\,1076},
189 doi = {10.1002/sia.1146},
190 file = {:DBD\\Bullett-SEM mask pattern-2001.pdf:PDF},
191 url = {http://dx.doi.org/10.1002/sia.1146}
195 author = {J. Carlier and others},
196 title = {Integrated microfluidics based on multi-layered SU-8 for mass spectrometry
198 journal = {J. Micromech. Microeng.},
201 pages = {619\,-\,624},
202 doi = {10.1088/0960-1317/14/4/024},
203 file = {Carlier04.pdf:Photolacke\\Carlier04.pdf:PDF},
204 url = {http://dx.doi.org/10.1088/0960-1317/14/4/024}
208 author = {Carlsson, DJ and Garton, A. and Wiles, DM},
209 title = {The weatherability of polypropylene monofilaments. Effects of fiber
210 production conditions},
211 journal = {Journal of Applied Polymer Science},
214 pages = {2963\,-\,2978},
216 doi = {10.1002/app.1977.070211112},
217 file = {:DBD\\Carlsson-PP-oxidation-1977.pdf:PDF},
218 publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
219 url = {http://dx.doi.org/10.1002/app.1977.070211112}
223 author = {W.R. Carr},
224 title = {On the Laws Governing Electric Discharges in Gases at Low Pressures},
225 journal = {Phil. Trans. Roy. Soc. Lond. Math. Phys. Sci.},
229 doi = {10.1098/rsta.1903.0020},
230 file = {:DBD\\Carr-Electric dischare at low pressure-1903.pdf:PDF},
231 url = {http://dx.doi.org/10.1098/rsta.1903.0020}
235 author = {H.-K. Chang and Y.-K. Kim},
236 title = {{UV-LIGA process for high aspect ratio structure using stress barrier
237 and C-shaped etch hole}},
238 journal = {Sensors and Actuators A},
241 pages = {342\,-\,350},
242 doi = {10.1016/S0924-4247(00)00408-8},
243 file = {SU-8-Aspektverhaeltnis-Springer.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Springer.pdf:PDF},
244 url = {\href{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}{http://dx.doi.org/10.1016/S0924-4247(00)00408-8}}
248 author = {F.M. Charbonnier and C.J. Bennette and L.W.~Swanson},
249 title = {Electrical Breakdown between Metal Electrodes in High Vacuum. I.
251 journal = {J. Appl. Phys.},
254 pages = {627\,-\,633},
255 doi = {10.1063/1.1709385},
256 file = {:DBD\\Charbonnier-Breakdown-1967.pdf:PDF},
258 url = {http://dx.doi.org/10.1063/1.1709385}
262 author = {F.M. Charbonnier and C.J. Bennette and L.W. Swanson},
263 title = {Electrical Breakdown between Metal Electrodes in High Vacuum. II.
265 journal = {J. Appl. Phys.},
268 pages = {634\,-\,640},
269 doi = {10.1063/1.1709386},
270 file = {:DBD\\Charbonnier-Breakdown-1967-2.pdf:PDF},
272 url = {http://dx.doi.org/10.1063/1.1709386}
276 author = {J.J. Coogan and A.D. Sappey},
277 title = {Distribution of {OH} within silent discharge plasma reactors},
278 journal = {IEEE Trans. Plasma Sci.},
283 doi = {10.1109/27.491706},
284 file = {:DBD\\Coogan-FilamentDiameter-1996.pdf:PDF},
285 url = {http://dx.doi.org/10.1109/27.491706}
289 author = {P. Cutler},
290 title = {Theory of electron emission in high fields from atomically sharp
291 emitters: Validity of the Fowler-Nordheim equation},
292 journal = {Progress in Surface Science},
295 pages = {169\,-\,185},
297 doi = {10.1016/0079-6816(93)90068-7},
298 file = {:DBD\\Cutler-Emission in high fields-1993.pdf:PDF},
299 url = {\href{http://dx.doi.org/10.1016/0079-6816(93)90068-7}{http://dx.doi.org/10.1016/0079-6816(93)90068-7}}
303 title = {Metals handbook: desk edition},
304 publisher = {ASM International},
306 author = {J.R. Davis},
312 author = {A.J. Dikmans and others},
313 title = {A new compact disc format of high density array synthesis applied
314 to peptide nucleic acids and in situ {MALDI} analysis},
315 journal = {Molecular diversity},
318 pages = {197\,-\,207},
320 doi = {10.1023/B:MODI.0000036234.66238.4e},
321 file = {:Allgemein\\Dikmans-Amino-array-2004.pdf:PDF},
322 url = {http://dx.doi.org/10.1023/B:MODI.0000036234.66238.4e}
326 author = {Rajesh Dorai},
327 title = {Modeling of Atmospheric Pressure Plasma Processing of Gases and Surfaces},
328 school = {University of Illinois at Urbana-Champaign},
330 file = {:DBD\\Dorai-plasma-reactions-2002.pdf:PDF},
331 url = {http://uigelz.eecs.umich.edu/pub/theses/rajesh_phd_thesis.pdf}
335 author = {R. Dorai and M.J. Kushner},
336 title = {A model for plasma modification of polypropylene using atmospheric
337 pressure discharges},
338 journal = {J. Phys. D: Appl. Phys},
341 pages = {666\,-\,685},
343 doi = {10.1088/0022-3727/36/6/309},
344 file = {:DBD\\Dorai-PP-Surface-chemistry-2003.pdf:PDF},
345 publisher = {IOP PUBLISHING LTD},
346 url = {http://dx.doi.org/10.1088/0022-3727/36/6/309}
350 author = {S. Dushman},
351 title = {Electron Emission from Metals as a Function of Temperature},
352 journal = {Physical Review},
355 pages = {623\,-\,636},
356 doi = {10.1103/PhysRev.21.623},
357 file = {:DBD\\Dushman-Thermionic-Emission-1923.pdf:PDF},
359 url = {http://dx.doi.org/10.1103/PhysRev.21.623}
363 author = {J.G. Eden and others},
364 title = {Microplasma devices fabricated in silicon, ceramic, and metal/polymer
365 structures: arrays, emitters and photodetectors},
366 journal = {J. Phys. D: Appl. Phys.},
369 pages = {2869\,-\,2877},
370 doi = {10.1088/0022-3727/36/23/001},
371 file = {:DBD\\Eden-Cavity Silicon-2003.pdf:PDF},
372 url = {http://dx.doi.org/10.1088/0022-3727/36/23/001}
376 author = {M. Eichler and M. Thomas and H. Mewes and C.-P. Klages},
377 title = {{Ortsselektive Atmosphärendruck-Plasmavorbehandlung für das Direkt-Wafer-Bonden
378 bei niedrigen Temperaturen}},
379 booktitle = {Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg.
380 Berlin: VDE-Verlag, 2005, pp. 115-118},
382 file = {Waferbonden_Eichler.pdf:DBD\\Waferbonden_Eichler.pdf:PDF},
383 url = {http://www.vde-verlag.de/data/buecher.php?action=bookdetail\&vertriebsnr=562926}
387 author = {B. Eliasson and U. Kogelschatz},
388 title = {Modeling and applications of silent discharge plasmas},
389 journal = {IEEE Trans. Plasma Sci.},
392 pages = {309\,-\,323},
394 doi = {10.1109/27.106829},
395 file = {:DBD\\Eliasson-Modelling-1991.pdf:PDF},
396 url = {http://dx.doi.org/10.1109/27.106829}
400 author = {F.Kleinschmidt, U.Stöhr, K.Saalwächter and others},
401 title = {NMR Spectroscopy Characterization and Self-Diffusion Study of Partially
402 Swollen Polymer Networks.},
403 journal = {Macromol. Chem. Phys.},
406 pages = {F24\,-\,F25}
409 @INPROCEEDINGS{Fahl01,
410 author = {M. Fahland and C. Charton and V. Kirchhoff and U. Stöhr},
411 title = {Deposition of multilayer optical coatings onto plastic webs by pulse
412 magnetron sputtering; challenges and opportunities},
413 booktitle = {Proceedings 6th. International Symposium on Sputtering and Plasma
414 Processes (ISSP), p. 189, Kanazawa, Japan},
416 file = {:Allgemein\\Fahrland-Sputtering-2001.pdf:PDF}
420 author = {W.W. Flack and H.A. Nguyen and E. Capsuto},
421 title = {Characterization of a novel photoresist redistribution material for
422 advanced packaging applications},
423 booktitle = {Society of Photo-Optical Instrumentation Engineers (SPIE) Conference
427 pages = {1203\,-\,1216},
428 doi = {10.1117/12.474198},
429 file = {:Photolacke\\SINR-resist-2002.pdf:PDF},
430 url = {http://dx.doi.org/10.1117/12.474198}
434 author = {R.G. Forbes},
435 title = {Refining the application of Fowler-Nordheim theory},
436 journal = {Ultramicroscopy},
440 doi = {10.1016/S0304-3991(99)00097-2},
441 file = {:DBD\\Forbes - Refining the application of Fowler-Nordheim theory.pdf:PDF},
442 url = {http://dx.doi.org/10.1016/S0304-3991(99)00097-2}
446 author = {R.H. Fowler and L. Nordheim},
447 title = {Electron Emission in Intense Electric Fields},
448 journal = {Proceedings of the Royal Society of London. Series A, Containing
449 Papers of a Mathematical and Physical Character},
452 pages = {173\,-\,181},
455 file = {:DBD\\Fowler-Nordheim-1928.pdf:PDF},
456 url = {http://www.jstor.org/pss/95023}
460 author = {S.R. Gaboury and M.W. Urban},
461 title = {Microwave plasma reactions of solid monomers with silicone elastomer
462 surfaces: a spectroscopic study},
463 journal = {Langmuir},
466 pages = {3225\,-\,3233},
468 doi = {10.1021/la00035a076},
469 file = {:DBD\\Gaboury-Epoxy-on-PDMS-1993.pdf:PDF},
470 publisher = {American Chemical Society},
471 url = {http://dx.doi.org/10.1021/la00035a076}
475 author = {{GEKA~mbH}},
476 title = {Destroying chemical warfare agents and contaminated military waste},
477 howpublished = {Internet: http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html
478 (accessed 06-09-2009)},
480 url = {http://www.geka-munster.de/Seiten-engl/vernichtung/plasma-index.html}
483 @MASTERSTHESIS{Gerb03,
484 author = {M. Gerbracht},
485 title = {{Trocknung dicker Photoresistschichten mittels unterschiedlicher
486 Trocknungsverfahren}},
487 school = {Fachhochschule Düsseldorf},
489 type = {Diplomarbeit},
490 file = {:Photolacke\\Resiste_Diplomarbeit_Gerbracht.pdf:PDF}
493 @INPROCEEDINGS{Golub02-2,
494 author = {Yu.B. Golubovskii and V.A. Maiorov v J. Behnke and J.F. Behnke},
495 title = {Stability of the barrier discharge relative to the filamentation},
496 booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
499 file = {Golubovskii02-Filament-stability.pdf:DBD\\Golubovskii02-Filament-stability.pdf:PDF},
500 url = {http://optics.phys.spbu.ru/~golub/articles/barrier2d\_16ESCAMPIG.pdf}
504 author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
505 title = {Modelling of the homogeneous barrier discharge in helium at atmospheric
507 journal = {J. Phys. D: Appl. Phys.},
511 doi = {10.1088/0022-3727/36/1/306},
512 file = {DBD_Heliumatmosphäre_Golubovskii03.pdf:DBD_Heliumatmosphäre_Golubovskii03.pdf:PDF},
513 url = {http://dx.doi.org/10.1088/0022-3727/36/1/306}
516 @INPROCEEDINGS{Golub01,
517 author = {Yu.B. Golubovskii and V.A. Maiorov and J. Behnke and J.F. Behnke},
518 title = {The role of emission from the dielectric surface in a homogeneous
519 barrier discharge in nitrogen},
520 booktitle = {Proc. of 15th Int. Symp. on Plasma Chemistry (Orléans, France, 10-13
521 July 2001) vol VIII p 3239-3244},
523 file = {DBD_EmissionenausDielektrikum_Golubovskii01.pdf:DBD\\DBD_EmissionenausDielektrikum_Golubovskii01.pdf:PDF},
524 url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_ISPC15.pdf}
528 author = {Yu. B. Golubovskii},
529 howpublished = {Internet:\newline http://optics.phys.spbu.ru/\textasciitilde{}golub/images/filament.jpg
530 (accessed 07-09-2009)},
532 url = {http://optics.phys.spbu.ru/~golub/images/filament.jpg}
535 @INPROCEEDINGS{Golub02,
536 author = {Yu. B. Golubovskii and V. A. Maiorov and J. Behnke and J. F. Behnke},
537 title = {Some Aspects of the Modeling of an Uniform Barrier Discharge in Nitrogen},
538 booktitle = {Proc. of 16th ESCAMPIG/5th ICRP (Grenoble, France, 14-18 July 2002),
541 file = {DBD_N2Atmosphäre_Golubovskii02.pdf:DBD\\DBD_N2Atmosphäre_Golubovskii02.pdf:PDF},
542 url = {http://optics.phys.spbu.ru/~golub/articles/DBD\_N2\_16ESCAMPIG.pdf}
546 author = {Yu. B. Golubovskii and others},
547 title = {Homogeneous barrier discharge},
548 howpublished = {Internet: http://optics.phys.spbu.ru/\textasciitilde{}golub/english/barrier.html},
549 url = {http://optics.phys.spbu.ru/~golub/english/barrier.html}
553 author = {A. Goossens and E.L. Maloney and J Schoonman},
554 title = {Gas-Phase Synthesis of Nanostructured Anatase $\mathrm{TiO_2}$},
555 journal = {Chemical Vapor Deposition},
558 pages = {109\,-\,114},
560 doi = {10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U},
561 file = {:DBD\\Goossens-TiCl4-1998.pdf:PDF},
562 publisher = {WILEY-VCH Verlag GmbH Weinheim},
563 url = {\href{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}{http://dx.doi.org/10.1002/(SICI)1521-3862(199805)04:03<109::AID-CVDE109>3.0.CO;2-U}}
567 author = {I. Graz and A. Ebner and S. Bauer and C. Romanin and H. Gruber},
568 title = {Micropatterned atmospheric pressure discharge surface modification
569 of fluorinated polymer films for mammalian cell adhesion and protein
571 journal = {Appl. Phys. A},
574 pages = {547\,-\,555},
575 doi = {10.1007/s00339-008-4614-z},
576 file = {:DBD\\Graz-Patterned surface treatment-2008.pdf:PDF},
577 url = {http://dx.doi.org/10.1007/s00339-008-4614-z}
581 author = {M. Han and W. Lee and S.-K. Lee and S.S. Lee},
582 title = {{3D microfabrication with inclined/rotated UV lithography}},
583 journal = {Sensors and Actuators A},
587 doi = {10.1016/j.sna.2003.10.006},
588 file = {Rotated UV.pdf:Photolacke\\Rotated UV.pdf:PDF},
589 url = {http://dx.doi.org/10.1016/j.sna.2003.10.006}
593 author = {K. Handique and D.T. Burke and C.H. Mastrangelo and M.A. Burns},
594 title = {{Nanoliter liquid metering in microchannels using hydrophobic patterns}},
595 journal = {Anal. Chem.},
598 pages = {4100\,-\,4109},
600 doi = {10.1021/ac000064s},
601 file = {:Allgemein\\Handique-hydrophobic-channels-2000.pdf:PDF},
602 url = {http://dx.doi.org/10.1021/ac000064s}
606 author = {M. Heise and W. Neff and O. Franken and P. Muranyi and J. Wunderlich},
607 title = {Sterilization of Polymer Foils with Dielectric Barrier Discharges
608 at Atmospheric Pressure},
609 journal = {Plasmas polym.},
613 doi = {10.1023/B:PAPO.0000039814.70172.c0},
614 file = {DBD_Sterilisation_Heise2004.pdf:DBD\\DBD_Sterilisation_Heise2004.pdf:PDF},
615 url = {http://dx.doi.org/10.1023/B:PAPO.0000039814.70172.c0}
619 author = {K. Hensel and others},
620 title = {Electrical and Optical Properties of {AC} Microdischarges in Porous
622 journal = {Plasma Process. Polym.},
625 pages = {682\,-\,693},
626 doi = {10.1002/ppap.200700022},
627 file = {:DBD\\Hensel-DBD-in-Ceramics-2007.pdf:PDF},
628 publisher = {WILEY-VCH Verlag Weinheim},
629 url = {http://dx.doi.org/10.1002/ppap.200700022}
633 author = {M. Heule and U.P. Schönholzer and L.J. Gauckler},
634 title = {Patterning colloidal suspensions by selective wetting of microcontact-printed
636 journal = {J. Eur. Ceram. Soc.},
639 pages = {2733\,-\,2739},
640 doi = {10.1016/j.jeurceramsoc.2003.09.011},
641 file = {:DBD\\Heule2004.pdf:PDF},
642 url = {http://dx.doi.org/10.1016/j.jeurceramsoc.2003.09.011}
646 author = {M.O. Heuschkel and L. Guérin and B. Buisson and D. Bertrand and P.
648 title = {Buried microchannels in photopolymer for delivering of solutions
649 to neurons in a network},
650 journal = {Sensors and Actuators B},
653 pages = {356\,-\,361},
654 doi = {10.1016/S0925-4005(98)00071-9},
655 file = {buried microchannels in photopolymer.pdf:Photolacke\\buried microchannels in photopolymer.pdf:PDF},
656 url = {\href{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}{http://dx.doi.org/10.1016/S0925-4005(98)00071-9}}
660 author = {K.H. Ho and S.T. Newman and S. Rahimifard and R.D. Allen},
661 title = {State of the art in wire electrical discharge machining {(WEDM)}},
662 journal = {Int. J. Mach. Tool. Manufact.},
665 pages = {1247\,-\,1259},
666 number = {12\,-\,13},
667 doi = {10.1016/j.ijmachtools.2004.04.017},
668 publisher = {Elsevier},
669 url = {http://dx.doi.org/10.1016/j.ijmachtools.2004.04.017}
673 author = {N. Inagaki and S. Tasaka and M. Makino},
674 title = {Plasma polymer deposition from mixture of tetramethoxysilane and
675 oxygen on {PET} films and their oxygen gas barrier properties},
676 journal = {J. Appl. Polym. Sci.},
679 pages = {1031\,-\,1039},
681 doi = {10.1002/%28SICI%291097-4628%2819970509%2964%3A6%3C1031%3A%3AAID-APP1%3E3.0.CO%3B2-M},
682 file = {:DBD\\Inagaki-SiOx-oxygen-barrier-1996.pdf:PDF},
683 url = {http://dx.doi.org/10.1002/\%28SICI\%291097-4628\%2819970509\%2964\%3A6\%3C1031\%3A\%3AAID-APP1\%3E3.0.CO\%3B2-M}
687 author = {T. Ito and others},
688 title = {Characterization of a microfluidic device fabricated using a photosensitive
690 journal = {J. Micromech. Microeng.},
693 pages = {432\,-\,438},
694 doi = {10.1088/0960-1317/17/3/003},
695 file = {Ito07.pdf:Photolacke\\Ito07.pdf:PDF},
696 url = {http://dx.doi.org/10.1088/0960-1317/17/3/003}
700 author = {R.J. Jackman and T.M. Floyd and R. Ghodssi and M.A. Schmidt and K.F.
702 title = {Microfluidic systems with on-line UV detection fabricated in photodefinable
704 journal = {J. Micromech. Microeng.},
708 doi = {10.1088/0960-1317/11/3/316},
709 file = {Jack01.pdf:Photolacke\\Jack01.pdf:PDF},
710 url = {http://dx.doi.org/10.1088/0960-1317/11/3/316}
714 author = {K.L. Jensen},
715 title = {Electron emission theory and its application: Fowler--Nordheim equation
717 journal = {J. Vac. Sci. Technol. B},
720 pages = {1528\,-\,1544},
721 doi = {10.1116/1.1573664},
722 file = {:DBD\\2003_Electron emission theory and its application.pdf:PDF},
723 url = {http://dx.doi.org/10.1116/1.1573664}
727 author = {K.L. Jensen},
728 title = {Theory of Field Emission},
729 journal = {Vacuum Microelectronics},
731 volume = {Chapter 3},
732 pages = {33\,-\,104},
733 doi = {10.1002/0471224332.ch3},
734 url = {http://dx.doi.org/10.1002/0471224332.ch3}
738 author = {N. Jidenko and M. Petit and J.P. Borra},
739 title = {Electrical characterization of microdischarges produced by dielectric
740 barrier discharge in dry air at atmospheric pressure},
741 journal = {J. Phys. D: Appl. Phys.},
744 pages = {281\,-\,293},
746 doi = {10.1088/0022-3727/39/2/008},
747 file = {:DBD\\Jidenko-Plasma-Control-2006.pdf:PDF},
748 url = {http://dx.doi.org/10.1088/0022-3727/39/2/008}
752 author = {S. Jigueta and M. Judelewicza and S. Mischlerb and A. Bertchc and
754 title = {Effect of filler behavior on nanocomposite {SU8} photoresist for
756 journal = {Microelectron. Eng.},
759 pages = {1273\,-\,1276},
760 doi = {10.1016/j.mee.2006.01.068},
761 file = {Jiguet_SU-8_filler.pdf:Photolacke\\Jiguet_SU-8_filler.pdf:PDF},
762 url = {http://dx.doi.org/10.1016/j.mee.2006.01.068}
766 author = {W.S. Kang and J.M. Park and Y. Kim and S.H. Hong},
767 title = {Numerical study on influences of barrier arrangements on dielectric
768 barrier discharge characteristics},
769 journal = {IEEE Trans. Plasma Sci.},
772 pages = {504\,-\,510},
774 doi = {10.1109/TPS.2003.815469},
775 file = {:DBD\\Kang-StreamerSimulations-2003.pdf:PDF},
776 url = {http://dx.doi.org/10.1109/TPS.2003.815469}
780 author = {H. Kawauchi and K. Tuzimura and H. Maeda and N. Ishida},
781 title = {Reaction of fluorescein-isothiocyanate with proteins and amino acids:
782 {II.} Preparation of FIuorescein-Thiohydantoin Amino Acids and Their
783 Thin-layer Chromatography},
784 journal = {Journal of Biochemistry},
787 pages = {783\,-\,789},
789 file = {:Allgemein\\Kawauchi-FITC-reaction-1969.pdf:PDF},
790 publisher = {Jpn Biochemical Soc},
791 url = {http://jb.oxfordjournals.org/cgi/content/abstract/66/6/783}
794 @INPROCEEDINGS{Kien04,
795 author = {J. Kieninger and G. Jobst and G. Igel and I. Moser and G. Urban},
796 title = {{3D} Polymer Microstructures by Laminating {SU-8} Films},
797 booktitle = {{Proceedings of \textmu TAS 2004}},
800 pages = {363\,-\,365},
801 file = {:Photolacke\\Kieninger-Manuscript_microTAS04_SU.-8pdf.pdf:PDF}
805 author = {K. Kim and others},
806 title = {{A tapered hollow metallic microneedle array using backside exposure
808 journal = {J. Micromech. Microeng.},
811 pages = {597\,-\,603},
812 doi = {10.1088/0960-1317/14/4/021},
813 file = {Hollow Needles.pdf:Photolacke\\Hollow Needles.pdf:PDF},
814 url = {http://dx.doi.org/10.1088/0960-1317/14/4/021}
818 author = {S.-O. Kim and J.G. Eden},
819 title = {Arrays of Microplasma Devices Fabricated in Photodefinable Glass
820 and Excited {AC or DC} by Interdigitated Electrodes},
821 journal = {IEEE Photonics Technology Letters},
824 pages = {1543\,-\,1545},
825 doi = {10.1109/LPT.2005.848260},
826 file = {:DBD\\Kim-Cavity Array Foturan-2005.pdf:PDF},
827 url = {http://dx.doi.org/10.1109/LPT.2005.848260}
830 @INPROCEEDINGS{Kim08,
831 author = {Y.K. Kim and D. J. Kim},
832 title = {Deposition of super hydrophobic {a-C:F} films by dielectric barrier
833 discharge at atmospheric pressure},
834 booktitle = {Book of Abstract of 11th International Conference on Plasma Surface
835 Engineering PSE 2008},
837 file = {:DBD\\Kim-CxFy-surface-DBD-2008.pdf:PDF},
838 url = {http://www.pse2008.net/pdf\_edit/tmp/PO1063-PSE2008-2f1418.pdf}
842 author = {C.P. Klages and C. Berger and M. Eichler and M. Thomas},
843 title = {Microplasma-Based Treatment of Inner Surfaces in Microfluidic Devices},
844 journal = {Contributions to Plasma Physics},
848 doi = {10.1002/ctpp.200710008},
849 file = {:DBD\\Klages-plasmaprinting-channels-2007.pdf:PDF},
850 publisher = {WILEY-VCH Verlag Berlin},
851 url = {http://dx.doi.org/10.1002/ctpp.200710008}
855 author = {C.P. Klages and K. Höpfner and N. Kläke and R. Thyen},
856 title = {Surface functionalization at atmospheric pressure by {DBD}-based
857 pulsed plasma polymerization},
858 journal = {Plasmas and Polymers},
863 doi = {10.1023/A:1009583815474},
864 file = {:DBD\\Klages-Epoxy-groups-2000.pdf:PDF},
865 publisher = {Springer},
866 url = {\newline http://dx.doi.org/10.1023/A:1009583815474}
870 author = {C.P. Klages and others},
871 title = {Surface Technology with Cold Microplasmas},
872 journal = {Plasma Process. Polym.},
875 pages = {208\,-\,218},
877 doi = {10.1002/ppap.200600116},
878 file = {:DBD\\Klages-Overview-07.pdf:PDF},
879 publisher = {John Wiley \& Sons, Ltd},
880 url = {\newline http://dx.doi.org/10.1002/ppap.200600116}
884 author = {U. Kogelschatz},
885 title = {Dielectric-barrier Discharges: Their History, Discharge Physics,
886 and Industrial Applications},
887 journal = {Plasma Chem. Plasma Process.},
891 doi = {10.1023/A:1022470901385},
892 file = {kogelschatz.pdf:DBD\\kogelschatz.pdf:PDF},
893 url = {http://dx.doi.org/10.1023/A:1022470901385}
897 author = {U. Kogelschatz},
898 title = {Filamentary, Patterned, and Diffuse Barrier Discharges},
899 journal = {IEEE Trans. Plasma Sci.},
902 pages = {1400\,-\,1408},
904 doi = {10.1109/TPS.2002.804201},
905 file = {:DBD\\Kogelschatz-Filaments-2002.pdf:PDF},
906 url = {http://dx.doi.org/10.1109/TPS.2002.804201}
910 author = {T. Koida and H. Fujiwara and M. Kondo},
911 title = {Hydrogen-doped $\mathrm{In_{2}O_{3}}$ as High-mobility Transparent
913 journal = {Jpn. J. Appl. Phys.},
916 pages = {L685\,-\,L687},
918 doi = {10.1143/JJAP.46.L685},
919 file = {:Allgemein\\Koida-ITO-2007.pdf:PDF},
920 url = {http://dx.doi.org/10.1143/JJAP.46.L685}
924 author = {K.V. Kozlov and others},
925 title = {Barrier discharges in {N2/O}2 mixtures},
926 journal = {J. Phys. D: Appl. Phys.},
929 pages = {518\,-\,529},
930 doi = {10.1088/0022-3727/38/4/003},
931 file = {:DBD\\Kozlov-oxygen-impurity-2005.pdf:PDF},
932 url = {http://dx.doi.org/10.1088/0022-3727/38/4/003}
936 author = {S. Kreitz and C. Penache and M. Thomas and C.-P. Klages},
937 title = {Patterned {DBD} treatment for area-selective metallization of polymers-plasma
939 journal = {Surf. Coat. Technol.},
942 pages = {676\,-\,679},
943 doi = {10.1016/j.surfcoat.2005.01.085},
944 file = {:DBD\\Kreitz05-Patterned DBD treatment.pdf:PDF},
945 url = {http://dx.doi.org/10.1016/j.surfcoat.2005.01.085}
949 author = {E. Kukharenka and M.M. Farooqui and L. Grigore and M. Kraft and N.
951 title = {Electroplating moulds using dry film thick negative photoresist.},
952 journal = {J. Micromech. Microeng.},
955 pages = {S67\,-\,S74},
956 doi = {10.1088/0960-1317/13/4/311},
957 file = {Ordyl-1.pdf:Photolacke\\Ordyl-1.pdf:PDF},
958 url = {http://dx.doi.org/10.1088/0960-1317/13/4/311}
962 author = {E.E. Kunhardt},
963 title = {Generation of Large-Volume, Atmospheric-Pressure, Nonequilibrium
965 journal = {IEEE Trans. Plasma Sci.},
968 pages = {189\,-\,200},
969 doi = {10.1109/27.842901},
970 file = {:DBD\\Kunhardt00-Frequency-Ignition.pdf:PDF},
971 url = {http://dx.doi.org/10.1109/27.842901}
975 author = {M.G. Kwak and others},
976 title = {Improvement of Luminance Efficiency in Xenon Dielectric Barrier Discharge
978 journal = {IEEE Trans. Plasma Sci.},
981 pages = {176\,-\, 178},
982 doi = {10.1109/TPS.2003.808867},
983 file = {Kwak-Xenon-Lamp-2002.pdf:DBD\\Kwak-Xenon-Lamp-2002.pdf:PDF},
984 url = {http://dx.doi.org/10.1109/TPS.2003.808867}
988 author = {B.A. Langowski and K.E. Uhrich},
989 title = {Microscale Plasma-Initiated Patterning (\textmu {PIP})},
990 journal = {Langmuir},
993 pages = {10509\,-\,10514},
994 doi = {10.1021/la052222m},
995 file = {:DBD\\Langowski-PDMS plasma patterning-2005.pdf:PDF},
996 url = {\newline http://dx.doi.org/10.1021/la052222m}
1000 author = {L. Ledernez and F. Olcaytug and G. Urban and H. Yasuda},
1001 title = {Influence of the Electrode Material on the Electrical Breakdown of
1003 note = {accepted for Plasma Sources Science and Technology}
1007 author = {K. Levenberg},
1008 title = {A method for the solution of certain non-linear problems in least
1010 journal = {Q. Appl. Math},
1013 pages = {164\,-\,168},
1018 author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
1019 title = {Low temperature plasma channels generated in microcavity trenches
1020 with widths of 20\,-\,150\,\textmu{}m and aspect ratios as large
1021 as 10\textsuperscript{4}\,:\,1},
1022 journal = {Appl. Phys. Lett.},
1025 pages = {1397\,-\,1402},
1026 doi = {10.1063/1.2827197},
1027 file = {:DBD\\Lu-Plasma channels-2008.pdf:PDF},
1028 url = {http://dx.doi.org/10.1063/1.2827197}
1032 author = {M. Lu and S.-J. Park and B.T. Cunningham and J.G. Eden},
1033 title = {Microcavity Plasma Devices and Arrays Fabricated by Plastic-Based
1035 journal = {J. Microelectromech. Syst.},
1038 pages = {1397\,-\,1402},
1039 doi = {10.1109/JMEMS.2006.886034},
1040 file = {:DBD\\Lu-Microcavities by molding-2007.pdf:PDF},
1041 url = {http://dx.doi.org/10.1109/JMEMS.2006.886034}
1045 author = {N. Lucas},
1046 title = {Microplasma Stamps - An Atmospheric-Pressure Plasma Source for the
1047 Area-Selective Modification of Surfaces},
1048 school = {Institute for Microtechnology, TU Braunschweig},
1050 url = {http://www.shaker.de/Online-Gesamtkatalog/details.asp?ID=8983398&CC=3631&ISBN=3-8322-8008-1}
1054 author = {N. Lucas and V. Ermel and M. Kurrat and S. Büttgenbach},
1055 title = {Microplasma stamps for selective surface modification: design and
1057 journal = {J. Phys. D: Appl. Phys.},
1060 pages = {215202 (7pp)},
1061 doi = {10.1088/0022-3727/41/21/215202},
1062 file = {:DBD\\Lucas-PDMS-Stamps-2.pdf:PDF},
1063 url = {http://dx.doi.org/10.1088/0022-3727/41/21/215202}
1067 author = {N. Lucas and A. Hinze and C.-P. Klages and S. Büttgenbach},
1068 title = {Design and optimization of dielectric barrier discharge microplasma
1070 journal = {J. Phys. D: Appl. Phys.},
1073 pages = {194012 (5pp)},
1074 doi = {10.1088/0022-3727/41/19/194012},
1075 file = {:DBD\\Lucas-PDMS-Stamps-1.pdf:PDF},
1076 url = {http://dx.doi.org/10.1088/0022-3727/41/19/194012}
1080 author = {G.S. Malkov and others},
1081 title = {Pulsed-Plasma-Induced Micropatterning with Alternating Hydrophilic
1082 and Hydrophobic Surface Chemistries},
1083 journal = {Plasma Process. Polym.},
1086 pages = {129\,-\,145},
1088 doi = {10.1002/ppap.200700118},
1089 file = {:DBD\\Malkov-SEM mask pattern-2008.pdf:PDF},
1090 publisher = {John Wiley \& Sons, Ltd},
1091 url = {http://dx.doi.org/10.1002/ppap.200700118}
1095 author = {Donald W. Marquardt},
1096 title = {An Algorithm for Least-Squares Estimation of Nonlinear Parameters},
1097 journal = {SIAM Journal on Applied Mathematics},
1100 pages = {431\,-\,441},
1102 doi = {10.1137/0111030},
1104 url = {http://dx.doi.org/10.1137\%2F0111030}
1108 author = {C.R. Martin and I.A. Aksay},
1109 title = {Submicrometer-scale patterning of ceramic thin films},
1110 journal = {J. of Electroceramics},
1113 pages = {53\,-\,68},
1115 doi = {10.1023/B:JECR.0000034001.15359.98},
1116 file = {:Allgemein\\Martin-Patterning-Ceramics-Overview-2004.pdf:PDF},
1117 publisher = {Springer},
1118 url = {http://dx.doi.org/10.1023/B:JECR.0000034001.15359.98}
1122 author = {C. Martinet and V. Paillard and A. Gagnaire and J. Joseph},
1123 title = {Deposition of $\mathrm{SiO_2}$ and $\mathrm{TiO_2}$ thin films by
1124 plasma enhanced chemical vapor deposition for antireflection coating},
1125 journal = {J. Non-Cryst. Solids},
1128 pages = {77\,-\,82},
1129 doi = {10.1016/S0022-3093(97)00175-0},
1130 file = {:DBD\\Martinet-SiO2-TiO2-1997.pdf:PDF},
1131 url = {\href{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}{http://dx.doi.org/10.1016/S0022-3093(97)00175-0}}
1135 author = {F. Massines and others},
1136 title = {The role of dielectric barrier discharge atmosphere and physics on
1137 polypropylene surface treatment},
1138 journal = {Plasmas and Polymers},
1141 pages = {35\,-\,49},
1143 doi = {10.1023/A:1011365306501},
1144 file = {:DBD\\Massines-oxygen-impurities-2001.pdf:PDF},
1145 url = {http://dx.doi.org/10.1023/A:1011365306501}
1149 author = {T. Masuzawa and T. Takawashi},
1150 title = {{Recent trends in EDM/ECM technologies in Japan}},
1151 journal = {VDI BERICHTE},
1155 publisher = {VDI VERLAG GMBH}
1159 author = {A. Mata and A.J. Fleischmann and S. Roy},
1160 title = {Fabrication of multi-layer {SU-8} microstructures},
1161 journal = {J. Micromech. Microeng.},
1164 pages = {276\,-\,284},
1165 doi = {10.1088/0960-1317/16/2/012},
1166 file = {SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm6_2_012.pdf:PDF},
1167 url = {http://dx.doi.org/10.1088/0960-1317/16/2/012}
1171 author = {K.A. Melzak and C.S. Sherwood and R.F.B. Turner and C.A. Haynes},
1172 title = {Driving forces for {DNA} adsorption to silica in perchlorate solutions},
1173 journal = {J. Colloid Interface Sci.},
1176 pages = {635\,-\,644},
1178 doi = {10.1006/jcis.1996.0421},
1179 file = {:Allgemein\\Melzak-DNA-SiOx-Adsorption-1996.pdf:PDF},
1180 publisher = {Elsevier},
1181 url = {\newline http://dx.doi.org/10.1006/jcis.1996.0421}
1185 author = {W. Menz and R. Förster and A. Schoth and C. Müller},
1186 title = {Non-conventional machining for microsystems},
1187 booktitle = {Proc. 3rd Euspen Int. Conf.},
1193 author = {S.F. Miralaï and others},
1194 title = {Electrical and Optical Diagnostics of Dielectric Barrier Discharges
1195 {(DBD) in He and N2} for Polymer Treatment},
1196 journal = {Plasmas and Polymers},
1199 pages = {63\,-\,77},
1201 doi = {10.1023/A:1009531831404},
1202 file = {:DBD\\Miralai-oxygen-impurity-2000.pdf:PDF},
1203 url = {http://dx.doi.org/10.1023/A:1009531831404}
1206 @INPROCEEDINGS{TOK06,
1207 author = {K. Misumi and others},
1208 title = {Faster sensitivity and non-antimonite permanent photoresist for {MEMS}},
1209 booktitle = {Advances in Resist Technology and Processing XXIII},
1211 editor = {Qinghuang Lin},
1213 series = {Proceedings of SPIE},
1215 organization = {SPIE},
1216 doi = {10.1117/12.656249},
1217 file = {TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:Photolacke\\TOK-Faster Sensitivity and Non-Antimonite Permanent Photoresist for MEMS.pdf:PDF},
1218 url = {http://dx.doi.org/10.1117/12.656249}
1222 author = {K. Misumi and K. Saito and A. Yamanouchi and T. Senzaki and H. Honma},
1223 title = {Minute Tunnel Structure Formation with Permanent Film Photoresist},
1224 journal = {J. Photopolym. Sci. Technol.},
1227 pages = {57\,-\,62},
1228 doi = {10.2494/photopolymer.19.57},
1229 file = {TOK-Minute tunnel structure formation with permanent film photoresist.pdf:Photolacke\\TOK-Minute tunnel structure formation with permanent film photoresist.pdf:PDF},
1230 url = {\newline http://dx.doi.org/10.2494/photopolymer.19.57}
1234 author = {W.M. Mullins and B.L. Averbach},
1235 title = {Surface properties of silicon and aluminum oxide powders},
1236 journal = {Surface Science},
1239 pages = {41\,-\,51},
1241 doi = {10.1016/0039-6028(88)90013-1},
1242 file = {:DBD\\Mullins-Work function of AluOxide-1988.pdf:PDF},
1243 publisher = {Elsevier},
1244 url = {\href{http://dx.doi.org/10.1016/0039-6028(88)90013-1}{http://dx.doi.org/10.1016/0039-6028(88)90013-1}}
1248 author = {E.L. Murphy and R.H. {Good, Jr.}},
1249 title = {Thermionic Emission, Field Emission, and the Transition Region},
1250 journal = {Phys. Rev.},
1253 pages = {1464 - 1473},
1254 doi = {10.1103/PhysRev.102.1464},
1255 file = {:DBD\\Murphy,Good - Thermionic Emission, Field Emission, and the Transition Region.pdf:PDF},
1256 url = {http://dx.doi.org/10.1103/PhysRev.102.1464}
1260 author = {I. Müller and C. Punset and E. Ammelt and H.-G. Purwins and J.P.
1262 title = {Self-Organized Filaments in Dielectric Barrier Glow Discharges},
1263 journal = {IEEE Trans. Plasma Sci.},
1266 pages = {20\,-\,21},
1267 doi = {10.1109/27.763004},
1268 file = {Müller-Filaments-glow-discharge-1999.pdf:DBD\\Müller-Filaments-glow-discharge-1999.pdf:PDF},
1269 url = {http://dx.doi.org/10.1109/27.763004}
1273 author = {A. Nakajima and K. Hashimoto and T. Watanabe},
1274 title = {Recent studies on super-hydrophobic films},
1275 journal = {Monatshefte für Chemie\,/\,Chemical Monthly},
1278 pages = {31\,-\,41},
1279 doi = {10.1007/s007060170142},
1280 file = {:Allgemein\\TiO2-hydrophobic-Nakajima-2001.pdf:PDF},
1281 publisher = {Springer},
1282 url = {http://dx.doi.org/10.1007/s007060170142}
1286 author = {L. Niemeyer},
1287 title = {A generalized approach to partial discharge modeling},
1288 journal = {IEEE Transactions on Dielectrics and Electrical Insulation},
1291 pages = {510\,-\,528},
1293 doi = {10.1109/94.407017},
1294 file = {:DBD\\Niemeyer 95 generalized approach partial discharges.pdf:PDF},
1295 url = {http://dx.doi.org/10.1109/94.407017}
1299 author = {M. Noeske and J. Degenhardt and S. Strudthoff and U. Lommatzsch},
1300 title = {Plasma jet treatment of five polymers at atmospheric pressure: surface
1301 modifications and the relevance for adhesion},
1302 journal = {International Journal of Adhesion \& Adhesives},
1305 pages = {171\,-\,177},
1306 doi = {10.1016/j.ijadhadh.2003.09.006},
1307 file = {:DBD\\Noeske03-plasma jet treatment.pdf:PDF},
1308 url = {http://dx.doi.org/10.1016/j.ijadhadh.2003.09.006}
1312 author = {L. Nordheim},
1313 title = {Zur Theorie der thermischen Emission und der Reflexion von Elektronen
1315 journal = {Zeitschrift für Physik A Hadrons and Nuclei},
1318 pages = {833\,-\,855},
1319 number = {11\,-\,12},
1321 doi = {10.1007/BF01391020},
1322 file = {:DBD\\Nordheim-1928.pdf:PDF},
1323 url = {http://dx.doi.org/10.1007/BF01391020}
1327 author = {D. Nußbaum and D. Herrmann and T. Knoll and T. Velten},
1328 title = {Micromixing Structures for Lab-on Chip Applications: Fabrication
1329 and Simulation of 90° Zigzag Microchann els in Dry Film Resist},
1330 booktitle = {4M\,/\,ICOMM 2009 Conference},
1332 pages = {215\,-\,218},
1333 doi = {10.1243/17547164C0012009041},
1334 file = {:Photolacke\\Nußbaum-PerMX-2009.pdf:PDF},
1336 url = {http://dx.doi.org/10.1243/17547164C0012009041}
1340 author = {J. O'Brien},
1341 title = {Advanced photoresist technologies for microsystems},
1342 journal = {J. Micromech. Microeng.},
1345 pages = {353\,-\,358},
1346 doi = {10.1088/0960-1317/11/4/312},
1347 file = {OBrien01.pdf:Photolacke\\OBrien01.pdf:PDF},
1348 url = {http://dx.doi.org/10.1088/0960-1317/11/4/312}
1352 author = {A. Ohl and K. Schröder},
1353 title = {Plasma-induced chemical micropatterning for cell culturing applications:
1355 journal = {Surf. Coat. Technol.},
1358 pages = {820\,-\,830},
1359 doi = {10.1016/S0257-8972(99)00150-4},
1360 file = {:DBD\\Ohl-SEM grid pattern-1999.pdf:PDF},
1361 publisher = {Elsevier},
1362 url = {\href{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}{http://dx.doi.org/10.1016/S0257-8972(99)00150-4}}
1365 @PHDTHESIS{Olss1998,
1366 author = {Anders Olsson},
1367 title = {Valve-less Diffuser Micropumps},
1368 school = {School of Electrical Engineering, Royal Institute of Technology,
1371 file = {:Allgemein\\1998 Valve-less diffuser micropumps.pdf:PDF},
1372 url = {http://www.s3.kth.se/instrlab/research/dissertations/pdf/andersodoc.pdf}
1376 author = {C.-T. Pan and H. Yang and S.-C. Shen and M.-C. Chou and H.-P. Chou},
1377 title = {A low-temperature wafer bonding technique using patternable materials},
1378 journal = {J. Micromech. Microeng.},
1381 pages = {611\,-\,615},
1382 doi = {10.1088/0960-1317/12/5/315},
1383 file = {Wafer-Bonding-Pan.pdf:Photolacke\\Wafer-Bonding-Pan.pdf:PDF},
1384 url = {http://dx.doi.org/10.1088/0960-1317/12/5/315}
1388 author = {J. Park and I. Henins and H.W. Herrmann and G.S. Selwyn},
1389 title = {Discharge phenomena of an atmospheric pressure radio-frequency capacitive
1391 journal = {J. Appl. Phys.},
1394 pages = {20\,-\,28},
1395 doi = {10.1063/1.1323753},
1396 file = {:DBD\\Park01-Discharge phenomena.pdf:PDF},
1397 url = {http://dx.doi.org/10.1063/1.1323753}
1401 author = {S.-J. Park and K.S. Kim and J.G. Eden},
1402 title = {Nanoporous alumina as a dielectric for microcavity plasma devices:
1403 Multilayer {Al/AlO} structures},
1404 journal = {Appl. Phys. Lett.},
1408 doi = {10.1063/1.1923747},
1409 file = {:DBD\\Park-Cavitiy Al2O3-2005.pdf:PDF},
1411 url = {http://dx.doi.org/10.1063/1.1923747}
1415 author = {F. Paschen},
1416 title = {{Ueber die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure
1417 bei verschiedenen Drucken erforderliche Potentialdifferenz}},
1418 journal = {Annalen der Physik},
1421 pages = {69\,-\,96},
1423 doi = {10.1002/andp.18892730505},
1424 file = {:DBD\\Paschen-1889.pdf:PDF},
1425 url = {http://dx.doi.org/10.1002/andp.18892730505}
1429 author = {W.G. Payne and B.W. James and I.S. Falconer},
1430 title = {The Growth and Decay of Miniature Dielectric Barrier Discharges in
1431 Helium, Neon, and Argon},
1432 journal = {IEEE Trans. Plasma Sci.},
1435 pages = {170\,-\,171},
1436 doi = {10.1109/TPS.2002.1003978},
1437 file = {Payne-Discharge-Growth-2002.pdf:DBD\\Payne-Discharge-Growth-2002.pdf:PDF},
1438 url = {http://dx.doi.org/10.1109/TPS.2002.1003978}
1442 author = {{PCI-SIG}},
1443 title = {{PCI} Conventional specifications},
1444 howpublished = {Internet:\newline http://www.pcisig.com/specifications/conventional
1445 (accessed 08-01-2010)},
1446 url = {http://www.pcisig.com/specifications/conventional}
1450 author = {C. Penache and C. Gessner and T. Betker and V. Bartels and C.-P.
1452 title = {Plasma printing: patterned surface functionalisation and coating
1453 at atmospheric pressure},
1454 journal = {IEE Proc.-Nanobiotechnol.},
1457 pages = {139\,-\,144},
1458 booktitle = {Proceedings. 2nd VDE World Microtechnologies Congress, October 13
1460 doi = {10.1049/ip-nbt:20040836},
1461 file = {:DBD\\Penache04-Printing.pdf:PDF},
1462 url = {http://dx.doi.org/10.1049/ip-nbt:20040836}
1466 author = {A.V. Phelps and Z.Lj. Petrovic},
1467 title = {Cold-cathode discharges and breakdown in argon: surface and gas phase
1468 production of secondary electrons},
1469 journal = {Plasma Sources Sci. Technol.},
1472 pages = {21\,-\,44},
1473 doi = {10.1088/0963-0252/8/3/201},
1474 file = {:DBD\\Phelps-Petrovic-Secondary-emission-1999.pdf:PDF},
1475 publisher = {IOP PUBLISHING},
1476 url = {http://dx.doi.org/10.1088/0963-0252/8/3/201}
1479 @INPROCEEDINGS{Rada07,
1480 author = {A.D. Radadia and L. Cao and H.-K. Jeong and M.A. Shannon and R.I.
1482 title = {A {3D} Micromoxer Fabricated with Dry Film Resist},
1483 booktitle = {Proc. of MEMS 2007},
1485 pages = {361\,-\,364},
1486 doi = {10.1109/MEMSYS.2007.4433110},
1487 file = {:Photolacke\\Radadia-3D micromixer-2007.pdf:PDF},
1488 url = {http://dx.doi.org/10.1109/MEMSYS.2007.4433110}
1492 author = {M. Radmilovic-Radjenovic and Z.L. Petrovic and B. Radjenovic},
1493 title = {Modelling of breakdown behavior by {PIC/MCC} code with improved secondary
1495 journal = {J. Phys.: Conf. Ser.},
1500 booktitle = {Journal of Physics: Conference Series},
1501 doi = {10.1088/1742-6596/71/1/012007},
1502 file = {:DBD\\Radjenovic-secondary-emisson-2007.pdf:PDF},
1503 url = {http://dx.doi.org/10.1088/1742-6596/71/1/012007}
1507 author = {I. Radu and R. Bartnikas and G. Czeremuszkin and M.R. Wertheimer},
1508 title = {Diagnostics of Dielectric Barrier Discharges in Noble Gases: Atmospheric
1509 Pressure Glow and Pseudoglow Discharges and Spatio-Temporal Patterns},
1510 journal = {IEEE Trans. Plasma Sci.},
1513 pages = {411\,-\,421},
1515 doi = {10.1109/TPS.2003.811647},
1516 file = {:DBD\\Radu-filament-noble-gases-2003.pdf:PDF},
1517 url = {http://dx.doi.org/10.1109/TPS.2003.811647}
1521 author = {I. Radu and R. Bartnikas and M.R. Wertheimer},
1522 title = {Diagnostics and modelling of noble gas atmospheric pressure dielectric
1523 barrier discharges in homogeneous or diverging electric fields},
1524 journal = {J. Phys. D: Appl. Phys.},
1527 pages = {539\,-\,546},
1528 doi = {10.1088/0022-3727/38/4/005},
1529 file = {Radu-filament-noble-gases-2005.pdf:DBD\\Radu-filament-noble-gases-2005.pdf:PDF},
1530 url = {http://dx.doi.org/10.1088/0022-3727/38/4/005}
1534 author = {R.B. Rao and K.L. Krafcik and A.M. Morales and J. Lewis},
1535 title = {Microfabricated deposition nozzles for direct-write assembly of three-dimensional
1536 periodic structures},
1537 journal = {Adv. Mater.},
1540 pages = {289\,-\,293},
1542 doi = {10.1002/adma.200400514},
1543 file = {:Allgemein\\Rao-3D-ink-hexagonal-2005.pdf:PDF},
1544 publisher = {Wiley-VCH Verlag GmbH},
1545 url = {http://dx.doi.org/10.1002/adma.200400514}
1549 title = {The Emission of Electricity from Hot Bodies},
1550 publisher = {Longmans, Green and co.},
1552 author = {O.W. Richardson},
1553 url = {http://www.worldcat.org/wcpa/oclc/946804}
1557 author = {C. Sarra-Bournet and S. Turgeon and D. Mantovani and G. Laroche},
1558 title = {A study of atmospheric pressure plasma discharges for surface functionalization
1559 of {PTFE} used in biomedical applications},
1560 journal = {J. Phys. D: Appl. Phys.},
1563 pages = {3461\,-\,3469},
1565 doi = {10.1088/0022-3727/39/16/S03},
1566 file = {:DBD\\Sarra-Bournet-treatment-time-2006.pdf:PDF},
1567 url = {http://dx.doi.org/10.1088/0022-3727/39/16/S03}
1571 author = {Y. Sawada and S. Ogawa and M. Kogoma},
1572 title = {Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane
1573 films prepared by atmospheric pressure glow discharge},
1574 journal = {J. Phys. D: Appl. Phys.},
1577 pages = {1661\,-\,1661},
1578 doi = {10.1088/0022-3727/28/8/015},
1579 file = {:DBD\\Sawada-TEOS-SiOx-1995.pdf:PDF},
1580 publisher = {IOP PUBLISHING LTD},
1581 url = {http://dx.doi.org/10.1088/0022-3727/28/8/015}
1585 author = {A. Schenk and others},
1586 title = {Microstructured Electrode Arrays: Optical analysis of the Glow Discharge
1587 in a Magnified Electrode Gap},
1588 journal = {Plasma Process. Polym.},
1591 pages = {S927\,-\,S930},
1592 doi = {10.1002/ppap.200732301},
1593 file = {:DBD\\Schenk-Optical-Analysis.pdf:PDF},
1594 url = {http://dx.doi.org/10.1002/ppap.200732301}
1598 author = {K.H. Schoenbach and M. Moselhy and W. Shi},
1599 title = {Self-organization in cathode boundary layer microdischarges},
1600 journal = {Plasma Sources Sci. Technol.},
1603 pages = {177\,-\,185},
1605 doi = {10.1088/0963-0252/13/1/023},
1606 file = {:DBD\\Schoenbach-FilamentDiameter-2004.pdf:PDF},
1607 publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
1609 url = {http://dx.doi.org/10.1088/0963-0252/13/1/023}
1613 author = {U.P Schönholzer and L.J. Gauckler},
1614 title = {Ceramic parts patterned in the micrometer range},
1615 journal = {Adv. Mater.},
1618 pages = {630\,-\,632},
1620 file = {:Allgemein\\Schoenholzer-KeramikStrukturiertSintern1-1999.pdf:PDF},
1621 publisher = {WILEY-VCH Verlag GmbH Weinheim},
1622 url = {\href{http://www.cheric.org/research/tech/periodicals/doi.php?art_seq=646499}{http://www.cheric.org/research/tech/periodicals/doi.php?art\_seq=\newline 646499}}
1626 author = {R.C. Smith and others},
1627 title = {Chemical vapour deposition of the oxides of titanium, zirconium and
1628 hafnium for use as high-k materials in microelectronic devices. A
1629 carbon-free precursor for the synthesis of hafnium dioxide},
1630 journal = {Adv. Mater. Opt. and Electron.},
1633 pages = {105\,-\,114},
1635 doi = {10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J},
1636 file = {:DBD\\Smith-Ti-and-others-2000.pdf:PDF},
1637 publisher = {John Wiley \& Sons, Ltd. Chichester, UK},
1638 url = {\href{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}{http://dx.doi.org/10.1002/1099-0712(200005/10)10:3/5<105::AID-AMO402>3.0.CO;2-J}}
1642 title = {Infrared and Raman characteristic group frequencies: tables and charts},
1643 publisher = {John Wiley \& Sons},
1645 author = {G. Socrates},
1650 author = {J. R. Southern},
1651 title = {Toronto thunderstorm},
1652 howpublished = {Internet: \newline http://en.wikipedia.org/wiki/File:Krunkwerke\_-\_IMG\_4515\_\%28by-sa\%29.jpg
1653 (accessed 07-09-2009)},
1654 url = {http://en.wikipedia.org/wiki/File:Krunkwerke_-_IMG_4515_%28by-sa%29.jpg}
1658 author = {O. Stalter and B. Burger and S. Lehrmann},
1659 title = {{Silicon Carbide (SiC) D-MOS for grid-feeding solar-inverters}},
1660 booktitle = {European Conference on Power Electronics and Applications, 2007},
1663 doi = {10.1109/EPE.2007.4417654},
1664 file = {:Allgemein\\Stalter-SiC-Inverters-2007.pdf:PDF},
1665 url = {http://dx.doi.org/10.1109/EPE.2007.4417654}
1669 author = {S.M. Starikovskaia},
1670 title = {Plasma assisted ignition and combustion},
1671 journal = {J. Phys. D: Appl. Phys.},
1674 pages = {R265\,-\,R299},
1676 doi = {10.1088/0022-3727/39/16/R01},
1677 file = {:DBD\\Starikovskaia-Streamer-overview-2006.pdf:PDF},
1678 url = {http://dx.doi.org/10.1088/0022-3727/39/16/R01}
1682 author = {K. Stephan and others},
1683 title = {Fast prototyping using a dry film photoresist: microfabrication of
1684 soft-lithography masters for microfluidic structures},
1685 journal = {J. Micromech. Microeng.},
1688 pages = {N69\,-\,N74},
1689 doi = {10.1088/0960-1317/17/10/N01},
1690 file = {:Photolacke\\Stephan-DFR-Etertec-HQ-2007.pdf:PDF},
1691 url = {http://dx.doi.org/10.1088/0960-1317/17/10/N01}
1695 author = {U. Stöhr and others},
1696 title = {Porous photoresist stamps for selective plasma treatment},
1697 journal = {Plasma Processes Polym.},
1702 doi = {10.1002/ppap.200900063},
1703 file = {:DBD\\Stöhr-PlasmaStampSinterMetal-2010.pdf:PDF},
1704 url = {\newline http://dx.doi.org/10.1002/ppap.200900063}
1708 author = {Uwe Stöhr and others},
1709 title = {Multilayer Photoresist Stamps for Selective Plasma Treatment in Micrometer
1711 journal = {Plasma Process. Polym.},
1714 pages = {228\,-\,233},
1716 doi = {10.1002/ppap.200800217},
1717 file = {:DBD\\PlasmaPaper-Photoresist-finally-printed.pdf:PDF},
1718 url = {http://dx.doi.org/10.1002/ppap.200800217}
1722 author = {U. Stöhr and P. Vulto and P. Hoppe and G. Urban and H. Reinecke},
1723 title = {High-resolution permanent photoresist laminate for microsystem applications},
1724 journal = {J. Micro/Nanolith. MEMS MOEMS},
1728 doi = {10.1117/1.2964217},
1729 file = {:Photolacke\\TMMFPaperSPIE-2Draft.pdf:PDF},
1730 url = {http://dx.doi.org/10.1117/1.2964217}
1734 author = {J.W. Suk and J. Cho},
1735 title = {Capillary flow control using hydrophobic patterns},
1736 journal = {J. Micromech. Microeng.},
1739 pages = {N11\,-\,N15},
1741 doi = {10.1088/0960-1317/17/4/N01},
1742 file = {:Allgemein\\Suk-hydrophobic-channels-2007.pdf:PDF},
1743 url = {http://dx.doi.org/10.1088/0960-1317/17/4/N01}
1747 author = {H.M.L. Tan and T. Akagi and T. Ichiki},
1748 title = {Localized Plasma Treatment of Poly(dimethylsiloxane) Surfaces and
1749 Its Application to Controlled Cell Cultivation},
1750 journal = {J. Photopolym. Sci. Technol.},
1753 pages = {245\,-\,250},
1754 doi = {10.2494/photopolymer.19.245},
1755 file = {:DBD\\Tan06-Plasmajet.pdf:PDF},
1756 url = {http://dx.doi.org/10.2494/photopolymer.19.245}
1760 author = {{The LyX Team}},
1761 title = {LyX 1.6.x},
1762 howpublished = {Internet: http://www.lyx.org},
1763 url = {http://www.lyx.org}
1767 author = {D. Therriault and S.R. White and J.A. Lewis},
1768 title = {Chaotic mixing in three-dimensional microvascular networks fabricated
1769 by direct-write assembly},
1770 journal = {Nature Materials},
1773 pages = {265\,-\,271},
1775 doi = {10.1038/nmat863},
1776 file = {:Allgemein\\Therriault-Ink-Channels-2003.pdf:PDF},
1777 publisher = {Nature Publishing Group},
1778 url = {http://dx.doi.org/10.1038/nmat863}
1781 @INPROCEEDINGS{Thom06,
1782 author = {M. Thomas and M. Eichler and C.-P. Klages},
1783 title = {Coating with Atmospheric Pressure Plasma Processes: From Large Area
1784 to \textmu{}-Structures},
1785 booktitle = {49th Annual Technical Conference Proceedings},
1787 organization = {Society of Vacuum Coaters},
1788 url = {http://tinyurl.com/Thomas06}
1792 author = {M. Thomas and M. von Hausen and C.-P. Klages and P. Baumhof},
1793 title = {Generation of Stable Coatings with Carboxylic Groups by Copolymerization
1794 of {MAA} and {VTMS} using {DBD} at Atmospheric Pressure},
1795 journal = {Plasma Process. Polym.},
1798 pages = {S475\,-\,S481},
1799 doi = {10.1002/ppap.200731210},
1800 file = {:DBD\\Thomas-Carboxy-groups-2007.pdf:PDF},
1801 publisher = {WILEY-VCH Verlag Weinheim},
1802 url = {http://dx.doi.org/10.1002/ppap.200731210}
1806 title = {Electricity in Gases},
1807 publisher = {Clarendon Press},
1809 author = {J.S. Townsend},
1810 url = {http://www.worldcat.org/wcpa/oclc/4294747}
1814 title = {The Theory of Ionization of Gases by Collision},
1815 publisher = {Constable},
1817 author = {J.S. Townsend},
1818 url = {http://www.worldcat.org/wcpa/oclc/8460026}
1822 author = {Y.-C. Tsai and H.-P. Jen and K.-W. Lin and Y.-Z. Hsie},
1823 title = {Fabrication of microfluidic devices using dry film photoresist for
1824 microchip capillary electrophoresis},
1825 journal = {J. Chromatogr. A},
1828 pages = {267\,-\,271},
1829 doi = {0.1016/j.chroma.2005.12.003},
1830 file = {AF-5000-Photolack-2.pdf:Photolacke\\AF-5000-Photolack-2.pdf:PDF},
1831 url = {http://dx.doi.org/10.1016/j.chroma.2005.12.003}
1835 author = {Y.-C. Tsai and S.-J. Yang and H.-T. Lee and H.-P. Jen and Y.-Z. Hsieh},
1836 title = {Fabrication of a Flexible and Disposable Microreactor Using a Dry
1838 journal = {J. Chin. Chem. Soc.},
1841 pages = {683\,-\,688},
1842 file = {AF-5000-Photolack.pdf:Photolacke\\AF-5000-Photolack.pdf:PDF},
1843 url = {http://nr.stpi.org.tw/ejournal/ChiChemSociety/2006/EJ52-2006-683.pdf}
1847 author = {S. Udenfriend and others},
1848 title = {Fluorescamine: A Reagent for Assay of Amino Acids, Peptides, Proteins,
1849 and Primary Amines in the Picomole Range},
1850 journal = {Science},
1853 pages = {871\,-\,872},
1854 doi = {10.1126/science.178.4063.871},
1855 file = {:Allgemein\\Udenfriend-Fluorescamine-1972.pdf:PDF},
1856 url = {http://dx.doi.org/10.1126/science.178.4063.871}
1860 author = {T. Velten and others},
1861 title = {Packaging of Bio-MEMS: Strategies, Technologies, and Applications},
1862 journal = {IEEE trans. adv. packag.},
1865 pages = {533\,-\,546},
1866 doi = {10.1109/TADVP.2005.858427},
1867 file = {Velten05-review.pdf:Photolacke\\Velten05-review.pdf:PDF},
1868 url = {http://dx.doi.org/10.1109/TADVP.2005.858427}
1872 author = {K.D. Vora and B.Y. Shew and E.C. Harvey and J.P. Hayes and A.G. Peele},
1873 title = {{Specification of mechanical support structures to prevent SU-8 stiction
1874 in high aspect ratio structures}},
1875 journal = {J. Micromech. Microeng.},
1878 pages = {978\,-\,983},
1879 doi = {10.1088/0960-1317/15/5/012},
1880 file = {SU-8-Aspektverhaeltnis-jmm2005.pdf:Photolacke\\SU-8-Aspektverhaeltnis-jmm2005.pdf:PDF},
1881 url = {http://dx.doi.org/10.1088/0960-1317/15/5/012}
1885 author = {P. Vulto and G. Igel and G.A. Urban},
1886 title = {Full wafer fabrication process for microfluidic glass chips with
1887 electroplated electrodes},
1888 booktitle = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
1891 pages = {117\,-\,120},
1892 doi = {10.1109/SENSOR.2007.4300085},
1893 file = {:Photolacke\\Vult07.pdf:PDF},
1894 journal = {Solid-State Sensors, Actuators and Microsystems Conference, 2007.
1896 url = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=4300085}
1899 @INPROCEEDINGS{Vult06-2,
1900 author = {P. Vulto and C. Klaunick and G. Igel and G. Urban},
1901 title = {{tmRNA} purification by electrophoretic filtration for genomic identification
1902 of bacteria on-a-chip},
1903 booktitle = {Proceedings of \textmu{}TAS 2006},
1906 pages = {377\,-\,379},
1907 file = {:Photolacke\\tmRNA purification - MicroTAS2006.pdf:PDF}
1911 author = {P. Vulto and others},
1912 title = {Selective sample recovery of DEP-separated cells and particles by
1913 phaseguide-controlled laminar flow},
1914 journal = {J. Micromech. Microeng.},
1917 pages = {1847\,-\,1853},
1918 doi = {10.1088/0960-1317/16/9/013},
1919 file = {Vult06.pdf:Photolacke\\Vult06.pdf:PDF},
1920 url = {http://dx.doi.org/10.1088/0960-1317/16/9/013}
1924 author = {P. Vulto and others},
1925 title = {Microfluidic channel fabrication in dry film resist for production
1926 and prototyping of hybrid chips},
1927 journal = {Lab on a Chip},
1930 pages = {158\,-\,162},
1931 doi = {10.1039/b411885e},
1932 file = {Vulto-Ordyl.pdf:Photolacke\\Vulto-Ordyl.pdf:PDF},
1933 url = {http://dx.doi.org/10.1039/b411885e}
1937 author = {C. Wang and X. He},
1938 title = {Polypropylene surface modification model in atmospheric pressure
1939 dielectric barrier discharge},
1940 journal = {Surface \& Coatings Technology},
1943 pages = {3377\,-\,3384},
1945 doi = {10.1016/j.surfcoat.2006.07.205},
1946 file = {:DBD\\Wang-PP-Contact-Angle-2006.pdf:PDF},
1947 publisher = {Elsevier},
1948 url = {http://dx.doi.org/10.1016/j.surfcoat.2006.07.205}
1952 author = {Y. Washio and others},
1953 title = {Multilayer ultra thick resist development for {MEMS}},
1954 booktitle = {Proceedings of SPIE},
1958 doi = {10.1117/12.600227},
1959 url = {http://dx.doi.org/10.1117/12.600227}
1963 author = {J.D. Williams and W. Wang},
1964 title = {Microfabrication of an electromagnetic power relay using {SU-8 based
1965 UV-LIGA} technology},
1966 journal = {Microsystem Technologies},
1969 pages = {699\,-\,705},
1970 doi = {10.1007/s00542-004-0396-1},
1971 file = {SU-8-Aspektverhaeltnis-2.pdf:Photolacke\\SU-8-Aspektverhaeltnis-2.pdf:PDF},
1972 url = {http://dx.doi.org/10.1007/s00542-004-0396-1}
1976 author = {X. Xu and L. Li and S. Wang and L. Zhao and T. Ye},
1977 title = {Deposition of $\mathrm{SiO_x}$ films with a capacitively-coupled
1978 plasma at atmospheric pressure},
1979 journal = {Plasma Sources Sci. Technol.},
1982 pages = {372\,-\,376},
1984 doi = {10.1088/0963-0252/16/2/021},
1985 file = {:DBD\\Xu-SiOx-DBD-2007.pdf:PDF},
1986 publisher = {Bristol, UK: IOP Pub.; Woodbury, NY: American Institute of Physics,
1988 url = {http://dx.doi.org/10.1088/0963-0252/16/2/021}
1992 author = {K. Yamada and T. Haraguchi and T. Kajiyama},
1993 title = {Plasma-graft polymerization of vinyl monomers with reactive groups
1994 onto a surface of poly (p-phenylene terephthalamide) fiber},
1995 journal = {J. Appl. Polym. Sci.},
1998 pages = {1847\,-\,1853},
2000 doi = {10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L},
2001 file = {:DBD\\Yamada-epoxy-grafting-1996.pdf:PDF},
2002 publisher = {Wiley Subscription Services, Inc., A Wiley Company New York},
2003 url = {\href{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}{http://dx.doi.org/10.1002/(SICI)1097-4628(19960613)60:11<1847::AID-APP8>3.0.CO;2-L}}
2007 title = {Luminous Chemical Vapor Deposition and Interface Engineering},
2008 publisher = {Marcel Dekker},
2010 editor = {Arthur T. Hubbard},
2011 author = {Hirotsugu Yasuda},
2013 series = {Surfactant Science Series},
2018 author = {L. Yu and others},
2019 title = {Adhesive bonding with SU-8 at wafer level for microfluidic devices},
2020 journal = {J. Phys.: Conf. Ser.},
2023 pages = {776\,-\,781},
2024 doi = {10.1088/1742-6596/34/1/128},
2025 file = {Yu06.pdf:Photolacke\\Yu06.pdf:PDF},
2026 url = {http://dx.doi.org/10.1088/1742-6596/34/1/128}
2030 author = {J. Zhang and M.B. Chan-Park and S.R. Conner},
2031 title = {Effect of exposure dose on the replication fidelity and profile of
2032 very high aspect ratio microchannels in {SU-8}},
2033 journal = {Lab on a Chip},
2036 pages = {646\,-\,653},
2037 doi = {10.1039/b403304c},
2038 file = {SU-8-Aspektverhaeltnis-Theorie.pdf:Photolacke\\SU-8-Aspektverhaeltnis-Theorie.pdf:PDF},
2039 url = {http://dx.doi.org/10.1039/b403304c}
2043 author = {J. Zhang. and K. Kato and Y. Uyama and Y. Ikada},
2044 title = {Surface graft polymerization of glycidyl methacrylate onto polyethylene
2045 and the adhesion with epoxy resin},
2046 journal = {J. Polymer Sci. Polymer Chem.},
2049 pages = {2629\,-\,2638},
2051 doi = {10.1002/pola.1995.080331509},
2052 file = {:DBD\\Zhang-epoxy-grafting-PE-1995.pdf:PDF},
2053 publisher = {John Wiley \& Sons, Inc. New York},
2054 url = {http://dx.doi.org/10.1002/pola.1995.080331509}
2058 author = {Y. Zhao and M.-W. Urban},
2059 title = {Spectroscopic studies of microwave plasma reactions of maleic anhydride
2060 on poly (vinylidene fluoride) surfaces: crystallinity and surface
2062 journal = {Langmuir},
2065 pages = {3538\,-\,3544},
2067 doi = {10.1021/la981310m},
2068 file = {:DBD\\Zhao-Carboxy-on-PVDF-1999.pdf:PDF},
2069 url = {http://dx.doi.org/10.1021/la981310m}
2073 author = {X.P. Zou and E.T. Kang and K.G. Neoh and C.Q. Cui and T.B. Lim},
2074 title = {Surface modification of poly (tetrafluoroethylene) films by plasma
2075 polymerization of glycidyl methacrylate for adhesion enhancement
2076 with evaporated copper},
2077 journal = {Polymer},
2080 pages = {6409\,-\,6418},
2082 doi = {10.1016/S0032-3861(01)00113-6},
2083 file = {:DBD\\Zou-epoxy-2001.pdf:PDF},
2084 publisher = {Elsevier},
2085 url = {\href{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}{http://dx.doi.org/10.1016/S0032-3861(01)00113-6}}
2089 title = {CRC Handbook of Chemistry and Physics},
2090 publisher = {Taylor and Francis},
2092 editor = {David R. Lide},
2095 file = {:DBD\\CRC-Work functions-2007.pdf:PDF},
2096 url = {http:/www.hbcpnetbase.com}
2099 @STANDARD{ASTME1294,
2100 title = {{ASTM}~E~1294-89~(1999), Standard Test Method for Pore Size Characteristics
2101 of Membrane Filters Using Automated Liquid Porosimeter},
2102 organization = {ASTM International},
2103 url = {http://www.astm.org/DATABASE.CART/WITHDRAWN/E1294.htm}
2107 title = {{ISO}~10780:1994, Stationary source emissions -- Measurement of velocity
2108 and volume flowrate of gas streams in ducts},
2109 organization = {ISO},
2110 url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=18855}
2114 title = {{ISO}~4003:1977, Permeable sintered metal materials -- Determination
2115 of bubble test pore size},
2116 organization = {ISO},
2117 url = {\newline http://www.iso.org/iso/catalogue\_detail.htm?csnumber=9678}
2121 title = {{ISO}~4287~(1997), Geometrical Product Specifications Surface Texture
2122 Profile Method Terms, Definitions and Surface Texture Parameters},
2123 organization = {ISO},
2124 url = {http://www.iso.org/iso/catalogue\_detail.htm?csnumber=10132}